Cookies helfen uns bei der Bereitstellung unserer Dienste. Durch die Nutzung unserer Dienste erklären Sie sich damit einverstanden, dass wir Cookies setzen.
De En Es
Kundenservice: +49 (0) 551 - 547 24 0

Cuvillier Verlag

30 Jahre Kompetenz im wissenschaftlichen Publizieren
Internationaler Fachverlag für Wissenschaft und Wirtschaft

Cuvillier Verlag

Premiumpartner
De En Es
Titelbild-leitlinien
Analysis of the Hole Shape Evolution in Ultrashort Pulse Laser Drilling

Printausgabe
EUR 30,70

E-Book
EUR 21,49

Analysis of the Hole Shape Evolution in Ultrashort Pulse Laser Drilling

Sven Döring (Autor)

Vorschau

Inhaltsverzeichnis, PDF (50 KB)
Leseprobe, PDF (150 KB)

ISBN-13 (Printausgabe) 9783954048670
ISBN-13 (E-Book) 9783736948679
Sprache Englisch
Seitenanzahl 154
Umschlagkaschierung matt
Auflage 1. Aufl.
Erscheinungsort Göttingen
Promotionsort Jena
Erscheinungsdatum 25.11.2014
Allgemeine Einordnung Dissertation
Fachbereiche Physik
Schlagwörter Physics, Optics, Laser, Material Processing, Laser Drilling, Physik, Optik, Materialbearbeitung, Laserbohren
Beschreibung

Ultrashort laser pulses are capable of generating micro structures with high precision and challenging quality for electronics, optics, medical and automotive applications. However, the realization of microstructures with high aspect-ratio, especially microdrillings, is still a demanding task. Deep drillings show the formation of bulges, a bending of the hole and multiple capillaries. A direct investigation of the drilling process in opaque materials, especially metals, is not feasible and different explanations for the hole shape formation have been developed. The specific contribution of the possible influences on the shape formation are not fully understood yet.

In this work, an in-situ observation of drilling in an opaque material is realized for the first time. Silicon is used as a model system for laser drilling in semiconductors and metals. The influence of the processing parameters on the hole shape evolution is studied in detail, in particular for the pulse energy, pulse duration, repetition rate as well as ambient pressure. The reasons for the special drilling behavior are examined with focus on the particle deposition, the plasma interaction and the light propagation inside the hole capillary.