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Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.
In this work an enhanced fabrication scheme for SIS junction devices has been developed and implemented into regular device fabrication at KOSMA. Electron beam lithography in combination with a chemical mechanical planarization (CMP) process has considerably improved submicron junction area reproducibility and electrical device characteristics. The fabrication scheme demonstrates enough development potential for future THz frequency SIS mixer designs.
ISBN-10 (Impresion) | 3865370934 |
ISBN-13 (Impresion) | 9783865370938 |
ISBN-13 (E-Book) | 9783736910935 |
Idioma | Deutsch |
Numero de paginas | 178 |
Edicion | 1 Aufl. |
Volumen | 0 |
Lugar de publicacion | Göttingen |
Lugar de la disertacion | Köln |
Fecha de publicacion | 09.06.2004 |
Clasificacion simple | Tesis doctoral |
Area |
Ingeniería
|