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Fabrication of Superconductor-Insulator-Superconductor Devices for Heterodyne Mixer Applications with Electron Beam Lithography

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Fabrication of Superconductor-Insulator-Superconductor Devices for Heterodyne Mixer Applications with Electron Beam Lithography (Tienda española)

Patrick Pütz (Autor)

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Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.

In this work an enhanced fabrication scheme for SIS junction devices has been developed and implemented into regular device fabrication at KOSMA. Electron beam lithography in combination with a chemical mechanical planarization (CMP) process has considerably improved submicron junction area reproducibility and electrical device characteristics. The fabrication scheme demonstrates enough development potential for future THz frequency SIS mixer designs.

ISBN-10 (Impresion) 3865370934
ISBN-13 (Impresion) 9783865370938
ISBN-13 (E-Book) 9783736910935
Idioma Deutsch
Numero de paginas 178
Edicion 1 Aufl.
Volumen 0
Lugar de publicacion Göttingen
Lugar de la disertacion Köln
Fecha de publicacion 09.06.2004
Clasificacion simple Tesis doctoral
Area Ingeniería