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Fabrication of Superconductor-Insulator-Superconductor Devices for Heterodyne Mixer Applications with Electron Beam Lithography (Tienda española)
Patrick Pütz (Autor)Previo
Indice, Datei (45 KB)
Lectura de prueba, Datei (130 KB)
| ISBN-10 (Impresion) | 3865370934 |
| ISBN-13 (Impresion) | 9783865370938 |
| ISBN-13 (E-Book) | 9783736910935 |
| Idioma | Deutsch |
| Numero de paginas | 178 |
| Edicion | 1 Aufl. |
| Volumen | 0 |
| Lugar de publicacion | Göttingen |
| Lugar de la disertacion | Köln |
| Fecha de publicacion | 09.06.2004 |
| Clasificacion simple | Tesis doctoral |
| Area |
Ingeniería
|
Descripcion
Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.
In this work an enhanced fabrication scheme for SIS junction devices has been developed and implemented into regular device fabrication at KOSMA. Electron beam lithography in combination with a chemical mechanical planarization (CMP) process has considerably improved submicron junction area reproducibility and electrical device characteristics. The fabrication scheme demonstrates enough development potential for future THz frequency SIS mixer designs.
