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Fabrication of Superconductor-Insulator-Superconductor Devices for Heterodyne Mixer Applications with Electron Beam Lithography

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Fabrication of Superconductor-Insulator-Superconductor Devices for Heterodyne Mixer Applications with Electron Beam Lithography (English shop)

Patrick Pütz (Author)

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Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.

In this work an enhanced fabrication scheme for SIS junction devices has been developed and implemented into regular device fabrication at KOSMA. Electron beam lithography in combination with a chemical mechanical planarization (CMP) process has considerably improved submicron junction area reproducibility and electrical device characteristics. The fabrication scheme demonstrates enough development potential for future THz frequency SIS mixer designs.

ISBN-13 (Printausgabe) 3865370934
ISBN-13 (Hard Copy) 9783865370938
ISBN-13 (eBook) 9783736910935
Language Alemán
Page Number 178
Edition 1 Aufl.
Volume 0
Publication Place Göttingen
Place of Dissertation Köln
Publication Date 2004-06-09
General Categorization Dissertation
Departments Engineering