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Leitlinien Unfallchirurgie
5. Auflage bestellen |
Table of Contents, Datei (45 KB)
Extract, Datei (130 KB)
ISBN-13 (Printausgabe) | 3865370934 |
ISBN-13 (Hard Copy) | 9783865370938 |
ISBN-13 (eBook) | 9783736910935 |
Language | Alemán |
Page Number | 178 |
Edition | 1 Aufl. |
Volume | 0 |
Publication Place | Göttingen |
Place of Dissertation | Köln |
Publication Date | 2004-06-09 |
General Categorization | Dissertation |
Departments |
Engineering
|
Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.
In this work an enhanced fabrication scheme for SIS junction devices has been developed and implemented into regular device fabrication at KOSMA. Electron beam lithography in combination with a chemical mechanical planarization (CMP) process has considerably improved submicron junction area reproducibility and electrical device characteristics. The fabrication scheme demonstrates enough development potential for future THz frequency SIS mixer designs.