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Fabrication of Superconductor-Insulator-Superconductor Devices for Heterodyne Mixer Applications with Electron Beam Lithography (English shop)
Patrick Pütz (Author)Preview
Table of Contents, Datei (45 KB)
Extract, Datei (130 KB)
Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.
In this work an enhanced fabrication scheme for SIS junction devices has been developed and implemented into regular device fabrication at KOSMA. Electron beam lithography in combination with a chemical mechanical planarization (CMP) process has considerably improved submicron junction area reproducibility and electrical device characteristics. The fabrication scheme demonstrates enough development potential for future THz frequency SIS mixer designs.
| ISBN-13 (Printausgabe) | 3865370934 |
| ISBN-13 (Hard Copy) | 9783865370938 |
| ISBN-13 (eBook) | 9783736910935 |
| Language | German |
| Page Number | 178 |
| Edition | 1 Aufl. |
| Volume | 0 |
| Publication Place | Göttingen |
| Place of Dissertation | Köln |
| Publication Date | 2004-06-09 |
| General Categorization | Dissertation |
| Departments |
Engineering
|
