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Fabrication of Superconductor-Insulator-Superconductor Devices for Heterodyne Mixer Applications with Electron Beam Lithography

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Fabrication of Superconductor-Insulator-Superconductor Devices for Heterodyne Mixer Applications with Electron Beam Lithography (English shop)

Patrick Pütz (Author)

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ISBN-13 (Printausgabe) 3865370934
ISBN-13 (Hard Copy) 9783865370938
ISBN-13 (eBook) 9783736910935
Language Alemán
Page Number 178
Edition 1 Aufl.
Volume 0
Publication Place Göttingen
Place of Dissertation Köln
Publication Date 2004-06-09
General Categorization Dissertation
Departments Engineering
Description

Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.

In this work an enhanced fabrication scheme for SIS junction devices has been developed and implemented into regular device fabrication at KOSMA. Electron beam lithography in combination with a chemical mechanical planarization (CMP) process has considerably improved submicron junction area reproducibility and electrical device characteristics. The fabrication scheme demonstrates enough development potential for future THz frequency SIS mixer designs.