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In-situ Prozessanalyse der CVS-Synthese von nano-kristallinem Siliziumkarbid mit Hilfe eines Aerosolmassenspektrometers

In-Kyum Lee – Author profile

Contributed to the following publications
In-situ Prozessanalyse der CVS-Synthese von nano-kristallinem Siliziumkarbid mit Hilfe eines Aerosolmassenspektrometers
In-situ Prozessanalyse der CVS-Synthese von nano-kristallinem Siliziumkarbid mit Hilfe eines Aerosolmassenspektrometers
In-Kyum Lee
Author
ISBN-13 (Hard Copy): 978-3-86537-436-3
ISBN-13 (eBook): 978-3-73691-436-0
Price_print
EUR 23.00 EUR 21.85
Price_ebook
EUR 16.10
2005-05-06
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