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Structure and Composition of Silicon Carbide Films Formed by Ion Implantation Techniques

Kerstin Volz – Author profile

Contributed to the following publications

Structure and Composition of Silicon Carbide Films Formed by Ion Implantation Techniques
Structure and Composition of Silicon Carbide Films Formed by Ion Implantation Techniques
Kerstin Volz
Author
ISBN-13 (Hard Copy): 978-3-89873-010-5
Price_print
EUR 29.00 EUR 27.55
2001-01-30

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