Periodische Transmissionsleitungen für die Mikroelektronik (English shop)

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This work investigates the implementation and evaluation of periodic transmission lines for integrated circuit technology. One focus lies on the realization of periodic, symmetric transmission lines with minimal area consumption and optimal properties. The realization of tunable transmission lines forms a further focus. The theoretical fundamentals are presented, from which the propagation properties of the two most common modes on periodic symmetric transmission lines are derived. Design strategies for unit cells are shown that lead to strong magnetic as well as electric coupling, resulting in significant advantages, namely a drastically increased area efficiency and higher quality factors. The subsequently described implementation forms of tunable unit cells enable differential transmission lines whose essential parameters, such as characteristic impedance, electrical length and quality factor, can be adjusted by means of tuning voltages. Furthermore, simulation methods for the computation of all structures and unit cells by means of field simulators in combination with circuit simulators are explained. A selection of theoretically developed and simulated structures is realized in a silicon technology of the ATMEL Corporation. The design of these structures allows their characterization by means of 4-port on-wafer scattering parameter measurement technique. The setup of the measurement bench is presented, and subsequently the execution of the calibration and the measurement is described. The detailed description of the methods for de-embedding these structures concludes the investigation. The measurement results are compared with the simulation results and discussed.