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Planarer Differenzdrucksensor in Silizium-Mikromechanik

Hartmut Gerlicher – Author profile

Contributed to the following publications

Planarer Differenzdrucksensor in Silizium-Mikromechanik
Planarer Differenzdrucksensor in Silizium-Mikromechanik
Hartmut Gerlicher
Author
ISBN-13 (Hard Copy): 978-3-86537-625-1
ISBN-13 (eBook): 978-3-73691-625-8
Price_print
EUR 27.00 EUR 25.65
Price_ebook
EUR 18.90
2005-10-10

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