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Ultrashort Pulse Laser Ablation of Bulk Materials Using Shaped Laser Beams

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Ultrashort Pulse Laser Ablation of Bulk Materials Using Shaped Laser Beams (English shop)

Dmitriy Mikhaylov (Author)


Extract, PDF (260 KB)
Table of Contents, PDF (42 KB)

ISBN-13 (Hard Copy) 9783736974463
ISBN-13 (eBook) 9783736964464
Language English
Page Number 176
Lamination of Cover matt
Edition 1.
Publication Place Göttingen
Place of Dissertation Dresden
Publication Date 2021-06-24
General Categorization Dissertation
Departments Mechanical and process engineering
Manufacturing and production engineering
Keywords ultrafast laser, ultrashort pulse laser, USP laser, ablation, laser ablation rate, volumetric ablation, laser beam stamping, beam shaping, beam splitting, spatial light modulator, diffraction, machine learning, convolutional neural network, CNN, Ultrakurzpulslaser, UKP Laser, Laserabtrag, Abtragsrate, Volumenabtrag, Laserstrahlstanzen, Strahlformung, Strahlteilung, räumlicher Lichtmodulator, Beugung, maschinelles Lernen, neuronales Netzwerk, Röntgenspektroskopie, Flüssigkristal, liquid crystal, spectroscopy, räumlicher Lichtmodulator, spatial light modulator, Rasterelektronenmikroskop, scanning electron microscope, Ultrakurzer Puls, ultrashort pulse, spezifische Wärmekapazität, specific heat capacity, Lichtgeschwindigkeit, speed of light, Laserstrahl, laser beam, Schraffurabstand, hatch distance, Eulersche Zahl, Euler’s number, Fluenz, fluence, Brennweite, focal length, Pulswiederholrate, pulse repetition rate, Wärmeleitfähigkeit, thermal conductivity, Gaußscher Punkt, Gaussian spots, Laserleistung, laser power, Lichtmodulator, light modulator, Wackelradius, wobbling radius, Scangeschwindigkeit, scanning velocity, kartesische Koordinaten, Cartesian coordinates, Schraffurwinkel, Lichtabsorptionskoeffizient, light absorption coefficient, absolute Temperatur, Stefan-Boltzmann-Konstante, Stefan–Boltzmann constant, Licht, source of energy, Energiequelle, Ultrakurzpuls USP, ultrashort pulse (USP), diffraktive Optik, diffractive optics
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High precision, high quality, and high throughput of ultrashort pulse laser ablation of bulk material are the most demanded properties that are required to let this process technology compete with other micro-machining techniques. Previous attempts to increase volumetric ablation rates of ultrashort pulse laser processes were based on the increase of fluence or pulse repetition rates. They run into limitations mainly set by the occurrence of bumpy surfaces due to overheating of bulk material.
In this work, the potential of laser beam shaping for the enhancement of ablation rates is studied systematically for the first time. The question regarding the physically shortest possible process time for ablation of 2.5D-structures by means of an ultrashort pulse laser is answered using a heat conduction model, which is extended by the ability to consider spatially shaped beams. The strategy of laser beam stamping is implemented in a novel optical setup and proven both theoretically and experimentally to have a great potential for increasing ablation rates.