Optimierung und Bewertung plasmapolymerer Barriereschichten durch einen alternierenden Aufbau im Rolle-zu-Rolle PE-CVD-Verfahren (English shop)

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In a roll-to-roll PE-CVD process, brittle SiOx barrier layers and flexible SiOxCy layers are deposited alternately. In addition to optimising the barrier performance of individual SiOx layers, the potential improvement of barrier properties by depositing multilayer systems is a central component of this work. Investigations regarding multilayer systems showed no improvement in barrier properties compared with single SiOx layers. Based on calculations of oxygen permeation using the pinhole model, it was established that macrodefects cannot represent the only pathway for oxygen permeation. By determining the void volume of the SiOx layers ellipsometrically on the basis of Maxwell-Garnett theory, it could be shown that nanodefects, caused by the layer formation process, play a greater role in limiting the barrier properties. It should be emphasised as a positive result that the deposition of a multilayer system made it possible to increase the extensibility of coated films, which means a greater tolerance towards mechanical stresses during the use and further processing of coated films.