Phasenseparierende Prozesse hochqualitativer optischer Schichten (English shop)

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According to the current state of the art, ion beam sputtering (IBS) is used to produce optical thin-film systems with the lowest loss rates, meeting the highest quality standards. Since the IBS process is relatively mature in its previous conception, only incremental improvements can be expected in the future.

With the aim of nevertheless improving the IBS process, the present work presents the possibility of extending the IBS process through the implementation of a separator concept. Using a separation method based on magnetic fields, it was possible to enhance the quality of optical coatings by reducing scattering values. In addition, this created a means of accessing the plasma species, opening up new degrees of freedom for manipulating the processes taking place during IBS. These options give the modified IBS process extensive design freedom with which coating procedures can be optimised.